C.技术规格:
两维测量滑架行程..........................................165mm×165mm
两维测量光栅分辨力.............................................0.001mm
回转工作台直径.................................................φ302mm
回转工作台角度分度值................................................1′
系统放大倍率.........................................30×、75×、150×
仪器主机外形尺寸(长×宽×高)......................750mm×600mm×650mm
仪器净重.........................................................80kg
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